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Coherent J-50MUV-193 with Diffuser

Updated:2025-03-13

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  • Brand: Coherent
  • Model: J-50MUV-193
  • Description: This J-50MUV-193 energy sensor incorporates the MaxUV coating and a diffuser to increase the maximum energy density and is optimized for use with ArF lasers operating at 193 nm and KrF lasers at 248 n
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Product Details

Coherent J-50MUV-193 with Diffuser Description:

Datasheet

This J-50MUV-193 energy sensor incorporates the MaxUV coating and a diffuser to increase the maximum energy density and is optimized for use with ArF lasers operating at 193 nm and KrF lasers at 248 nm. This sensor is directly calibrated at 248 nm and includes spectral compensation from 193 nm to 266 nm. It is terminated in a SmartProbe DB25 cable and is directly compatible with FieldMaxII-TOP, FieldMaxII-P, LabMax-TOP, and LabMax-Pro SSIM meters.

A large heatsink (PN 1123432) is available to extend the energy and repetition rates of EnergyMax sensors by increasing the average power capability.

Pyroelectric energy sensor with MaxUV coating and diffuser for measuring laser pulses from 125 μJ to 250 mJ at up to 200 pps.

Key Features:

193 to 266 nm spectral range

50 mm active area diameter

1125 μJ to 250 mJ energy range

200 pps repetition rate operation

ISO 17025 accredited

Specifications

Cable Type
J DB-25
Active Area Diameter
50 mm
Detector Coating
MaxUV
Energy Range
125 μJ to 250 mJ
Wavelength Range
190 nm to 266 nm
Noise Equivalent Energy
<4 μJ
Maximum Pyroelectric Rep. Rate (pulses per second)
200
Maximum Pulse Width (microseconds)
86
Maximum Energy Density (millijoules per square centimeter)
200 (@193nm, 10ns)
Maximum Energy Density (millijoules per square centimeter)
400 (at 193 nm, 10 ns)
Diffuser
DUV
Calibration Uncertainty (%)(k=2)
±3
Energy Linearity (%)
±3
Calibration Wavelength (nanometers)
193
Cable Length (meters)
2.5

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